二维码（扫一下试试看！） | | 微机械结构中考虑边界滑移的穿孔平板压膜阻尼分析 | | Compact Analytical Model of Squeeze-Film Damping Considering Slip Boundary Conditions in Perforated MEMS Structures | | 投稿时间：2016-01-29 | | DOI：10.15918/j.tbit1001-0645.2017.06.003 | | 中文关键词:压膜阻尼穿孔稀薄效应滑移 | | English Keywords:squeeze-film dampingperforatedrarefactionslip | | 基金项目:国家"八六三"计划项目（SS2013AA041104） | | | 摘要点击次数:742 | | 全文下载次数:835 | | 中文摘要: | | 针对微机械结构中的穿孔平板提出了一种精简的压膜阻尼计算模型，计算时考虑了气体的稀薄效应和穿孔造成的压力损失及其内壁产生的气流剪切力.分析时将穿孔平板分解为多个压力分布相同的圆环板，通过修正的雷诺方程得到每个圆环板的压力分布.考虑边界滑移解释了气体的稀薄效应，根据气体的流量守恒给出了穿孔造成的压力损失.为了验证理论模型的正确性，分别与Kwok、Veijola的理论模型和Pasquale的实验结果进行了对比.结果表明本文给出的阻尼计算模型相对于Kwok给出的阻尼计算模型计算起来更准确，相对于Veijola给出的阻尼计算模型在精度相差不大的情况计算起来更方便. | | English Summary: | | A compact analytical model of squeeze-film damping in perforated MEMS plates was presented. The compact analytical model took several factors into consideration, including the rarefaction of the air flow,the pressure loss caused by perforating and the air shear force formed on the inner wall. The perforated plate was divided into several identical circular cells. The pressure distribution in each circular cell was obtained through a modified Reynolds equation. The rarefaction effect of air flow was explained by considering the slip boundary conditions. The loss of pressure because of perforating was determined according to the conservation of air flow. The compact analytical model was compared with Kwok's analytical model, Veijola's analytical model and the experiment results obtained by Pasquale respectively in order to verify the correctness of the theoretical model. The results indicate that the compact analytical model presented in this paper computes more accurately than Kwok's model and more conveniently than Veijola's model. | | 查看全文查看/发表评论下载PDF阅读器 | |
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