姓　名 徐宗伟
职　称 副教授
所在系别 精密仪器工程系
行政职务 副系主任
所属课题组 微纳制造实验室
主讲课程 本科：《精密机械设计基础》《学院专业导论课》
研究生：《拉曼荧光光谱基础及应用》（全英文）
导师类型 精密仪器及机械——博导、硕导
办公地址 天津大学北洋科学楼106房间
联系电话
电子邮件 zongweixu@tju.edu.cn
通讯地址 天津大学精密仪器与光电子工程学院
邮政编码 300072
个人经历或学术经历
学历背景：
1997.9~2001.7，辽宁工学院化学机械系，工学学士
2001.9~2007.1，哈尔滨工业大学机电工程学院，工学硕士、博士。
学历背景：
2007.1~2009.3，天津大学，天津市微纳制造技术工程中心，博士后
2013.2~2013.6，英国University of Huddersfield，访问****
2013.6~2013.8，英国University of Strathclyde，访问****
2016.2~2017.1，德国Ruhr University Bochum，访问****
2018.1~2018.2，芬兰University of Helsinki、德国Fraunhofer研究所，访问****
2009.3~至今，天津大学精密仪器与光电子工程学院，副教授，博士生导师。


研究方向
1. 新型宽禁带半导体器件制造研究
2. 拉曼及荧光光谱表征研究
3. 离子束微纳加工技术及机理
4. 纳米功能器件设计、制备及应用
5. 微刀具制备及SEM在线观测纳米切削技术


科研项目、成果和专利
科研项目：
1. “碳化硅金刚石切削加工脆塑转变和材料去除机理研究”，国家自然基金委与德国科学基金会（NSFC-DFG）合作研究项目（No.），2018.01-2020.12，70万元，子课题负责人。
2. “基于SEM在线纳米切削的加工极限及材料去除机理研究”，国家自然科学基金项目(**)，2016.1-2019.12，73.9万元，负责人。
3. 1st Sino-German Symposium “Defect Engineering in SiC Device Manufacturing - Atomistic Simulations, Characterization and Processing”，国家自然科学基金委中德科学基金研究交流中心资助(GZ 1615), 2019年,中方负责人。
4. “新型功能器件的超快能量束加工研究”，国家重点实验室青年探索性课题(Pilt1705)，2017.8-2021.7，40万元，负责人。
5. “碳化硅半导体器件的制造基础研发”，国际合作项目(合作单位：德国Fraunhofer Institute for Integrated Systems and Device Technology IISB)，2017.10-2020.9，2017-2019年已交流四名本科毕设同学，一名研究生，中方负责人。
6. 1st Sino-German Summer School “Material-Oriented MicroNano Manufacturing”, 国家自然科学基金委中德科学基金研究交流中心资助项目(GZ 1471), 2018年8月, 21.6万元, 中方负责人。
7. 中德科学中心的项目准备访问项目(GZ 1538), 2019年1-2月, 中方负责人
8. “新工科国际化人才培养模式的探索和实践”，2018年高等学校仪器类专业新工科建设项目(2018C107)，负责人。
9. 2018-2019年国家优秀本科生公派留学项目（英国哈德斯菲尔德大学本科生交流项目），国家留学基金管理委员会，每年派送2名本科生同学。
10. 国家自然科学基金国际合作与交流项目（被英国皇家学会纳入“牛顿基金”）()，10万元，负责人。
11. 国家自然科学基金项目(**)，80万元，负责人。
12. 国家自然科学基金项目(**)，20万元，负责人。
13. 天津市自然科学基金项目(10JCYBJC06400)，10万元，负责人。
14. 中国博士后科学基金项目(一等)()，5万元，负责人。
15. 中国工程物理研究院开放基金项目(KF13008)，30万元，负责人。
16. “北洋****•青年骨干教师” E计划，10万元，负责人。
17. 国家自然科学基金重点项目(**)，40万元，合作单位负责人。
18. 工信部科技重大专项资助项目(2011ZX04014-071)，71万元，合作单位负责人。
授权专利：
1项PCT (US** (B2), JP** (B2)), 11项中国授权发明专利(ZL8.2, ZL20**, ZL3.1, ZL0.X, ZL1.0, ZL09,ZL3.2, ZL16, ZL3.7, ZL2.9, ZL 7.6)。
产学研成果：
通过自主技术开发，利用聚焦离子束微纳加工技术，已为德国Erlangen-Nuremberg大学、Mitutoyo Research Center Europe、清华大学、中科院成都光电所、中科院长春光机所、中科院上海技术物理所、南开大学、电子科技大学，飞思卡尔和Continental Automotive等高校、科研院所和企业，成功开发出复杂微结构、微/纳光学元件、纳米模板等难加工关键器件，解决了精密显微测量、纳米光学及微纳制造等领域关键功能器件的加工难题。

论文、专著
发表的主要论文：
1. Ying Song, Zongwei Xu*, Tao Liu, Mathias Rommel*, Hong Wang, Yufang Wang and Fengzhou Fang*, Depth Profiling of Ion-Implanted 4H–SiC Using Confocal Raman Spectroscopy, Crystals, 2020, 10(2):131
2. Zongwei Xu*, Lei Liu, Zhongdu He, Dongyu Tian, Alexander Hartmaier, Junjie Zhang, Xichun Luo, Mathias Rommel, Kai Nordlund, Guoxiong Zhang, Fengzhou Fang, Nanocutting Mechanism of 6H-SiC Investigated by Scanning Electron Microscope Online Observation, Stress-assisted and Ion-implant-assisted Approaches, The International Journal of Advanced Manufacturing Technology, 2020, 106:3869–3880
3. Zhanfeng Wang, Junjie Zhang*, Zongwei Xu, Jianguo Zhang, Guo Li, Haijun Zhang, Zengqiang Li, Hamad ul Hassan, Fengzhou Fang, Alexander Hartmaier, Yongda Yan, Tao Sun, Crystal anisotropy-dependent shear angle variation in orthogonal cutting of single crystalline copper, Precision Engineering 63 (2020) 41–48
4. Xiuhong Wang, Zongwei Xu?, Mathias Rommel?, Bing Dong, Le Song, Clarence Augustine TH Tee, Fengzhou Fang, Electron paramagnetic resonance characterization of aluminum ion implantation induced defects in 4H-SiC, Nanotechnology and Precision Engineering 2 (2019) 157–162
5. Kun Zhang, Zongwei Xu*, Andreas Rosenkranz*, Ying Song, Tao Xue, Fengzhou Fang, Surface- and tip-enhanced Raman scattering in tribology and lubricant detection – A prospective, Lubricants, 2019, 7, 81
6. Tao Liu, Zongwei Xu*, Mathias Rommel*, Hong Wang*, Ying Song, Yufang Wang and Fengzhou Fang, Raman Characterization of Carrier Concentrations of Al-implanted 4H-SiC with Low Carrier Concentration by Photo-Generated Carrier Effect, Crystals, 2019, 9, 428; doi:10.3390/cryst**
7. Lei Liu, Zongwei Xu*, Dongyu Tian, Alexander Hartmaier, Xichun Luo, Junjie Zhang, Fengzhou Fang, MD simulation of stress-assisted nanometric cutting mechanism of 3C silicon carbide, Industrial Lubrication and Tribology, 2019, Vol. 71, No. 5, 686–691
8. Huihui Luo, Zongwei Xu*, Changku Shi, Minglie Hu, Fangwen Sun, Li Shang, Fengzhou Fang, Nanofabrication of Nitrogen-Vacancy Color Center, Current Nanoscience, 15 (2019) 433-435
9. Lei Liu, Zongwei Xu*, Rongrong Li, Rui Zhu, Jun Xu*, Junlei Zhao, Chao Wang, Kai Nordlund, Xiu Fu, Fengzhou Fang, Molecular dynamics simulation of helium ion implantation into silicon and its migration, Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 456 (2019) 53-59
10. Z. W. Xu*, Y. Song, M. Rommel*, T. Liu, M. Kocher, Z. D. He, H. Wang, B. T. Yao, L. Liu, F. Z. Fang, Raman spectroscopy characterization of ion implanted 4H-SiC and its annealing effects, Materials Science Forum, 963 (2019) 424-428
11. M. Kocher, B. Yao, J. Weisse, M. Rommel*, Z.W. Xu*, T. Erlbacher, A.J. Bauer, Determination of compensation ratios of Al-implanted 4H-SiC by TCAD modelling of TLM measurements, Materials Science Forum, 963 (2019) 445-448
12. Xiu Fu, Zongwei Xu*, Zhongdu He, Alexander Hartmaier, Fengzhou Fang, Molecular dynamics simulation of silicon ion implantation into diamond and subsequent annealing, Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 450 (2019) 51-55
13. Ying Song, Zongwei Xu*, Rosenkranz Andreas*, Mathias Rommel, Changkun Shi, Fengzhou Fang, Surface Enhanced Raman Scattering Spectroscopy Study on Nanodiamond Derived Carbon Onions, Nanotechnology and Precision Engineering, 1 (2019) 35-39
14. Bing Liu, Zongwei Xu, Cheng Chen, Kuo Pang*, Yong Wang, Qinghai Ruan, Effect of tool edge radius on material removal mechanism of single-crystal silicon: Numerical and experimental study, Computational Materials Science, 163 (2019) 127-133
15. Bing Liu, Zongwei Xu, Cheng Chen∗, Rui Li, Chaohao Wang, Xiong Yang, In situ experimental study on material removal behaviour of single-crystal silicon in nanocutting, International Journal of Mechanical Sciences, 152 (2019) 378–383
16. Zhanfeng Wang, Junjie Zhang*, Zongwei Xu, Jianguo Zhang, Hamad ul Hassan, Guo Li, Haijun Zhang, Alexander Hartmaier, Fengzhou Fang, Yongda Yan, Tao Sun, Crystal plasticity finite element modeling and simulation of diamond cutting of polycrystalline copper, Journal of Manufacturing Processes, 38 (2019) 187-195.
17. Xu Z.W.*, He Z.D., Song Y., Fu X., Rommel M., Luo X., Hartmaier A., Zhang J., Fang F.Z. (2018): Topic Review: Application of Raman Spectroscopy Characterization in Micro/Nano-Machining. Micromachines, Vol. 9(7): 361.
18. He Z.D., Xu Z.W.*, Rommel M., Yao B.T., Liu T., Song Y. and Fang F.Z. (2018): Investigation of Ga ion Implantation induced damage in single-crystal 6H-SiC. Journal of Micromanufacturing, Vol. 1(2), 115-123.
19. Zhang L., You Y.S., Fu Y.Q.*, Xu Z.W., Fang F.Z. (2018): A Simplified and Cost-Effective Optical Absorber and Corresponding Photo-Thermal Effect. Plasmonics, Vol. 13 (1):265-268.
20. 徐宗伟,赵兵等(2017). 基于EBSD技术的单晶硅纳米切削研究. 天津大学学报,Vol.50 (1) :99-104
21. 贾瑞丽,徐宗伟等(2016). 面向Ga+和惰性离子的聚焦离子束加工机理的研究. 电子显微学报, Vol. 35(1):63-69.
22. Xu Z.W.*, Wang L.Y., Fang F.Z.*, Fu Y.Q., Yin Z. (2016): A Review on Colloidal Self-Assembly and their Applications. Current Nanoscience, Vol. 12, 725-746.
23. Xu, Z.W.*, Fu, Y.Q., Han, W., Wei, D.G., Jiao, H.S., Gao, H.F. (2016): Recent developments in focused ion beam and its application in nanotechnology. Current Nanoscience, Vol. 12, 696-711.
24. Hu, X.T., Xu, Z.W.*, Li, K., Fang, F.Z.*, Wang, L.Y. (2015): Fabrication of a au-polystyrene sphere substrate with three-dimensional nanofeatures for surface-enhanced raman spectroscopy. Applied Surface Science, Vol. 355, 1168-1174.
25. Fang, F.Z., Liu, B., Xu, Z.W.* (2015): Nanometric cutting in a scanning electron microscope. Precision Engineering, Vol. 41, 145–152.
26. Xiao, Y.J., Fang, F.Z.*, Xu, Z.W.*, Hu, X.T. (2015): Annealing recovery of nanoscale silicon surface damage caused by Ga focused ion beam. Applied Surface Science, Vol. 34, 56–69.
27. Wu, W., Xu, Z.W.*, Fang, F.Z.*, Liu, B., Xiao, Y.J., Chen, J.P., Wang, X.B., Liu, H.Z. (2014): Decrease of FIB-induced lateral damage for diamond tool used in nano cutting. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 330, 91-98.
28. Li, G.H., Xu, Z.W., Fang, F.Z.*, Wu, W., Xing, X.D., Li, W.L., Liu, H.Z. (2013): Micro cutting of V-shaped cylindrical grating template for roller nano-imprint. Journal of Materials Processing Technology, Vol.213, 895-904.
29. Xiao, Y.J., Fang, F.Z.*, Xu, Z.W., Wu, W., Shen, X.C. (2013): The study of Ga+ FIB implanting crystal silicon and subsequent annealing. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol.307, 253–256.
30. Xu, Z.W., Fang, F.Z.*, Gao, H.F., Zhu, Y.B., Wu, W., Weckenmann, A. (2012): Nano fabrication of star structure for precision metrology developed by focused ion beam direct writing. CIRP Annals - Manufacturing Technology, Vol. 61(1), 511–514.
31. Gao, T.T., Xu, Z.W., Fang, F.Z.*, Gao, W.L., Zhang, Q., Xu, X.X. (2012): High performance surface-enhanced Raman scattering substrates of Si-based Au film developed by focused ion beam nanofabrication. Nanoscale Research Letters, Vol. 7(1), 399.
32. Xie, C., Hu, M.L.*, Xu, Z.W., Wu, W., Gao, H.F., Qin, P., Zhang, D.P., Liu, B.W., Wang, C.Y. (2012): High power femtosecond Bessel-X pulses directly from a compact fiber laser system. Applied Physics Letters, Vol. 101, 151111.
33. Chen, Y.H., Fang, F.Z.*, Xu, Z.W., Zhang, X.D., Hu, X.T. (2012): Surface modification for brittle monocrystalline materials by MeV ions. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol.272(1), 433–436.
34. Xu, Z.W., Fang, F.Z.*, Zhang, S.J., Zhang, X.D., Hu, X.T., Fu, Y.Q., Li, L. (2010): Fabrication of micro DOE using micro tools shaped with focused ion beam. Optics Express, Vol.18, 8025-8032.
35. Fang, F.Z.*, Xu, Z.W., Hu, X.T., Wang, C.T., Luo, X.G., Fu, Y.Q. (2010): Nano-photomask fabrication using focused ion beam direct writing. CIRP Annals - Manufacturing Technology, Vol.59, 543–546.
36. Xu, Z.W., Fang, F.Z.*, Fu, Y.Q., Zhang, S.J., Han, T., Li, J.M. (2009): Fabrication of micro/nano structures using focused ion beam implantation and XeF2 gas assisted etching. Journal of Micromechanics and Microengineering, Vol.19, 054003(9pp).
出版书籍：
1. Shi, C. K., Luo, H. H., Xu, Z.W.* and Fang, F. Z. (2019): Nitrogen-Vacancy Color Centers in Diamond Fabricated by Ultrafast Laser Nanomachining. In: Zhang J., Guo B., Zhang J. (eds) Simulation and Experiments of Material-Oriented Ultra-Precision Machining. Springer Tracts in Mechanical Engineering. Springer, Singapore, ISBN 978-981-13-3335-4, 29pp. (Book Chapter) https://doi.org/10.1007/978-981-13-3335-4_11
2. Fang, F.Z., Xu, Z.W. (2018) Ion Beam Machining. In: Chatti S., Laperrière L., Reinhart G., Tolio T., The International Academy for Production (eds) CIRP Encyclopedia of Production Engineering. Springer, Berlin, Heidelberg, https://doi.org/10.1007/978-3-642-35950-7_6485-4
3. Xu, Z.W., Fang, F.Z. (2014): Section Editor, Handbook of Manufacturing Engineering and Technology. London, Springer.
4. Xu, Z.W., Fang, F.Z., Zeng, G.S. (2014): Focused Ion Beam Nanofabrication Technology. London, Springer. 33 pp. (Book Chapter).
5. Fang, F.Z., Xu, Z.W. (2014): State-of-the-Art for Nanomanufacturing using Ion Beam Technology. London, Springer. 37 pp. (Book Chapter).
6. Xu, Z.W., Fang, F.Z., Dong, S. (2011): Carbon Nanotube AFM Probe Technology. InTech. 20 pp. (Book Chapter. It was selected and included in the Research Collection Books by Intech marked its 10 anniversary in 2015).
7. Fu, Y.Q., Fang, F.Z., Xu, Z.W. (2011): Nanofabrication and Characterization of Plasmonic Structures. InTech. 24 pp. (Book Chapter).


奖励、荣誉和学术兼职
1 学术刊物兼职
Associate Editor, Journal of Mechanical Engineering Science, 2017-
Guest Editor, Current Nanoscience, 2016
Editorial Board Member, Nanotechnology and Precision Engineering, 2018-; Journal of Mechanics Engineering and Automation; 2016-, International Journal of Mechanical Engineering and Applications, 2017-;
Section Editor, Springer, In: Nee A.(Ed.) Handbook of Manufacturing Engineering and Technology, London, 2014

2 学术机构任职
中国微米纳米技术学会微纳米制造及装备分会理事，2016年至今
中国电子显微镜学会聚焦离子束FIB专业委员会委员，2012年至今
中国机械工程学会生产工程分会精密工程及微纳技术委员会委员，2010年至今

3 国际会议奖
1、中国工程院选拔代表（先进制造方向）
第四届中美工程前沿研讨会，美国，2015年
第一届中印青年工程领袖研讨会，印度，2015年
2、Young Researcher Award:
The 14th China-Japan International Conference on Ultra-Precision Machining Process (CJUMP2018), Harbin, 2018
亚洲精密工程与纳米技术学会, Japan, 2009

4 邀请报告：
2nd International Conference on Sensors and Electronic Instrumental Advances (Keynote, Spain 2016), EUSPEN (Session Keynote, UK 2016); ASPEN (Japan 2009, China 2015); nanoChemistry2019 (Session Keynote, Czech 2019)
The 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies (Chengdu 2018)
1st Sino-German Symposium, Modeling and Experiment of Material-Oriented Micro/Nano Manufacturing(MEMMM2017) (Harbin 2017);
中国微米纳米技术学会第十九届学术年会暨第八届国际会议(CSMNT2017)(Dalian 2017);
全国聚焦离子束FIB技术及学术交流研讨会(Beijing 2015, Lanzhou 2017, Beijing 2018); 中国科协青年科学家论坛; (“微纳制造技术研究与应用”北京 2014；“超精密加工研究现状与发展趋势”吉林 2018)全国“扫描电镜中能谱、电子背散射衍射技术及聚焦离子束”前沿技术与应用高端研修班(Harbin 2014)
北京大学 (2017); Cardiff University (UK 2016), University of Strathclyde (UK 2016);
ISNM summer school (Ultra-precision Manufacturing and Measurement)(Tianjin 2017, 2019);天津大学-香港大学夏令营(Tianjin 2017, 2018, 2019)
EMN Meeting (Germany 2016), etc.

5 会议主席/分会主席：
会议主席: 1st Sino-German Summer School “Material-Oriented MicroNano Manufacturing”，中方主席，德国 2018
会议主席: 第四届全国FIB技术及学术交流研讨会，天津 2013
分会主席: The 14th China-Japan International Conference on Ultra-Precision Machining Process (CJUMP2018)(Harbin, 2018)
MEMMM2017(Harbin 2017),
EMN Meeting (Germany 2016),
SEIA' 2016 (Spain 2016),
nanoMan2014 (Germany 2014),
ICMT 2012 (Tianjin 2012);
全国FIB技术及学术交流研讨会(2012, 2015, 2017)


6 国际学术会议学术（组织）委员会委员:
　　The Thirteenth International Conference on Sensor Technologies and Applications (SENSORCOMM 2019) (France 2019), The 4th CIRP Conference on Surface Integrity (CIRP CSI 2018)(China 2018); The 14th China-Japan International Conference on Ultra-Precision Machining Process (CJUMP2018), (China 2018); World Congress on Micro and Nano Manufacturing (Slovenia 2018, Taiwan 2017); International Conference on Nanochemistry (Nanochemistry 2017) (USA 2017); the 7th International Conference of Asian Society for Precision Engineering and Nanotechnology (ASPEN2017) (Korea 2017); 2017 International Symposium on Mechanical Design, Manufacture and Automation(ISMDMA, Dubai 2017), nanoMan (Singapore 2008, China 2010, Germany 2012, Macau 2016), International Conference on Sensors and Electronic Instrumental Advances (Dubai 2015, Spain 2016); 10th CHINA-JAPAN International Conference on Ultra- Precision Machining Process (China 2014); International Symposium on Micro/Nano Mechanical Machining and Manufacturing (China 2010), etc.

7 期刊审稿人：
　　Scientific Reports, Computational Materials Science, Nanotechnology, Applied Surface Science, Nanoscale Research Letters, Journal of Vacuum Science and Technology, Measurement Science and Technology, Precision Engineering, International Journal of Advanced Manufacturing Technology, Scanning, Current Nanoscience, Recent Patents on Nanotechnology, Journal of Materials Research, Journal of Process Mechanical Engineering, Science China Technological Sciences, International Journal of Nanomanufacturing, Journal of Materials Science and Chemical Engineering (MSCE), Scientific Reports, etc.

8、学校及学院奖励：
“北洋****•青年骨干教师”E计划，2013年
天津大学“教书育人”优秀青年教师，2012年
天津大学精仪学院第六届“我心目中的好老师”，2018年
“科研贡献奖”，天津大学精密仪器与光电子工程学院，2015年12月
“国际交流贡献奖”，天津大学精密仪器与光电子工程学院，2017年、2018年

9、其他：
天津市科学技术奖技术发明一等奖（排名第四），2013年
受邀参与QS全球学术调查 QS Global Academic Survey (QS World University Rankings®)(2017, 2018)
国家自然基金青年基金通讯评审人(2010, 2011, 2013, 2015, 2016, 2018, 2019)，北京市和广西省自然基金通讯评审人，教育部学位与研究生教育发展中心抽检学位论文通讯评审人（2014-2019）。
河北省新型半导体材料重点实验室学术委员会委员。