中文题目: 基于飞秒激光时空聚焦技术的三维微纳加工
外文题目: Three-Dimensional Micro- and Nano-Machining Based on Spatiotemporal Focusing Technique of Femtosecond Laser
作者: 井晨睿; 王朝晖; 程亚
刊名: 激光与光电子学进展
年: 2017 卷: 54 期: 4 页： 40005
中文关键词:
激光光学; 三维微纳加工; 时空聚焦技术; 加工分辨率; 脉冲前沿倾斜; 光强平面倾斜; 非互逆直写; 非线性光电离
英文关键词:
laser optics; three-dimensional micro- and nano-machining; spatiotemporal focusing technique; fabrication resolution; pulse front tilt; intensity plane tilt; non-reciprocal writing; nonlinear photo ionization
中文摘要:
介绍飞秒激光时空聚焦技术的基本原理,回顾了该技术在改善飞秒激光加工的分辨率、抑制加工过程中的非线性效应以及提高材料加工质量等方面的应用。重点讨论了脉冲前沿倾斜(PFT)、光强平面倾斜等时空聚焦飞秒激光脉冲的独特光场特性及其对材料加工产生的影响。介绍了时空聚焦技术在强场物理领域中的应用,并对该技术的适用范围进行了讨论。最后对该技术的特点和应用进行总结,并指明了未来的研究方向。

英文摘要:
The fundamental principle of spatiotemporal focusing technique of femtosecond laser is introduced in this paper, and applications of this technique on improving the resolution of femtosecond laser fabrication, suppressing the nonlinear effect of the fabricating process, and improving the materials fabrication quality are reviewed. Discussion is emphasized on the unique optical field characteristics of spatiotemporally focused femtosecond laser pulses including pulse front tilt (PFT) and intensity plane tilt, and their influence on material processing. Moreover, the applications of spatiotemporal focusing technique on high field physics and its scope of applications are introduced. Lastly, we summarize the principles and applications of spatiotemporal focusing technique, and suggest several directions for the future research.


文献类型: 期刊论文
正文语种: Chinese
收录类别: CSCD
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