中文题目: 基于振镜扫描方式的光学元件表面损伤检测
外文题目: Damage Inspection of Optical Surface Based on Galvanometer Scanning
作者: 郭亚晶; 唐顺兴; 姜秀青; 朱宝强; 林尊琪
刊名: 光学学报
年: 2017 卷: 37 期: 6 文章编号：612003
中文关键词:
测量; 损伤检测; 振镜; 扫描; 激光诱导损伤
英文关键词:

measurement; damage inspection; galvanometer; scanning; laser-induced damage
中文摘要:
振镜作为一种二维扫描器件,可以实现光学元件不同位置处表面情况在CCD相机上的成像,利用振镜扫描方式无需移动待检测光学元件和成像系统即可完成大口径光学元件表面损伤的扫描检测,提出了一种基于振镜扫描方式的大口径光学元件表面损伤检测方法。利用该方法对光学元件表面损伤点检测进行了验证实验,通过在元件表面设置基准点,利用振镜扫描步数及图像处理技术确定损伤点位置及尺寸,并与光学显微镜观察到的损伤情况进行对比,结果显示利用振镜扫描方法对元件表面损伤点位置及尺寸的检测结果与光学显微镜检测结果偏差较小。该检测系统分辨率可达到(2.080.015)mum/pixel,检测范围大于2.5cm,水平方向和竖直方向位置坐标检测准确度分别为3.76%和1.37%,损伤点尺寸检测准确度为6.19%,能够实现较大尺寸光学元件表面损伤点的高准确性检测。

英文摘要:
As a two-dimensional scanning device,galvanometer can be used to image surface damage status of different regions into CCD.The galvanometer scanning method can accomplish surface damage inspection of largeaperture optical elements without moving optical elements or imaging devices.A damage inspection method for largeaperture optical elements based on galvanometer scanning is presented.The experiment is conducted based on the galvanometer scanning method.By setting reference points on the optical element surface,the damage size and location are obtained after scanning steps and image processing.Then,the results are compared with those from microscope. The resolution of the inspection system is(2.080.015)mum/pixel,and the inspection range is larger than 2.5 cm. The inspection accuracies in the horizontal and vertical directions are 3.76%and 1.37%,respectively.The inspection accuracy of damage size is 6.19%.It demonstrates that the galvanometer scanning damage inspection method can detect the damage status on the large-aperture optical element surface with high accuracy.


文献类型: 期刊论文
正文语种: Chinese
收录类别: CSCD
DOI: 10.3788/AOS201737.0612003


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