中文题目: 基于交替相移掩模矢量空间像的偏振像差检测方法
外文题目: Measuring Method of Polarization Aberration Based on Vector Aerial Image of Alternating Phase-shift Mask
作者: 沈丽娜; 王向朝; 李思坤; 闫观勇; 诸波尔; 孟泽江; 张恒
刊名: 光学学报
年: 2016 卷: 36 期: 8 页： 811003
中文关键词:
成像系统; 光学制造; 光刻; 偏振像差; 泡利-泽尼克系数; 偏振像差测量
英文关键词:

imaging systems; optical fabrication; optical lithography; polarization aberration; Pauli-Zernike coefficient; polarization aberration measurement
中文摘要:
提出一种基于交替相移掩模空间像的光刻机投影物镜偏振像差检测方法。采用泡利-泽尼克系数表征偏振像差,结合X和Y两种线性偏振照明方式,用像传感器测量不同照明条件下掩模空间像的成像位置偏移与最佳焦面偏移,利用标定的偏振像差灵敏度矩阵计算获得泡利-泽尼克系数。采用光刻仿真软件对本文方法的有效性进行了验证,结果表明其检测精度优于3.07 mlambda。

英文摘要:
A measuring method of polarization aberration based on aerial image of alternating phase-shift mask is proposed.The polarization aberration is represented by Pauli-Zernike coefficients.The image placement error and best focus shift are measured by image sensor at multiple illumination settings,combined with X and Ylinearly polarized illuminating light.The Pauli-Zernike coefficients are retrieved using the calibrated sensitivity matrix of polarization aberration.The validity of this proposed method is verified by numerical simulations,and the results indicate that the measuring accuracy is less than 3.07 mlambda.


文献类型: 期刊论文
正文语种: Chinese
收录类别: CSCDEI
DOI: 10.3788/AOS201636.0828001


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