Study on the Key Influencing Factors in Atmospheric Pressure Plasma Processing of Fused Silica
Na Li, Bo Wang, Hui-Liang Jin
(School of Mechanical Engineering, Harbin Institute of Technology, Harbin 150001, China)
Abstract:
In order to get ultra-smooth fused silica surface without subsurface damage efficiently, the atmospheric pressure plasma processing (APPP) method has been developed. It is based on chemical reaction between active radicals excited by plasma and workpiece surface atoms, so the subsurface damage caused by contact stress can be avoided and atomic-level precision can be ensured. In this paper, based on the spectral quantitative analysis theory, the influence laws on material removal rate by the key factors of APPP including the flow rate of reaction gases, the input power, the processing distance and time are discussed. In addition, the results that APPP can remove the damaged surface layer and do not introduce secondary damage are proved via the nanoindentation technology.
Key words: atmospheric pressure plasma processing fused silica material removal rate surface quality
DOI：10.11916/j.issn.1005-9113.2014.05.021
Clc Number:TH16
Fund:
删除或更新信息，请邮件至freekaoyan#163.com(#换成@)
Study on the Key Influencing Factors in Atmospheric Pressure Plasma Processing of Fused Silica
本站小编 哈尔滨工业大学/2019-10-24
相关话题/Study Key Influencing Factors in
领限时大额优惠券,享本站正版考研考试资料!
优惠券领取后72小时内有效，10万种最新考研考试考证类电子打印资料任你选。涵盖全国500余所院校考研专业课、200多种职业资格考试、1100多种经典教材，产品类型包含电子书、题库、全套资料以及视频，无论您是考研复习、考证刷题，还是考前冲刺等，不同类型的产品可满足您学习上的不同需求。 ...考试优惠券 本站小编 Free壹佰分学习网 2022-09-19Morphology Similarity Distance for Bearing Fault Diagnosis Based on Multi-Scale Permutation Entropy
Morphology Similarity Distance for Bearing Fault Diagnosis Based on Multi-Scale Permutation Entropy Author NameAffiliationJinbao ZhangSchool of Mechatronics Engineering, Harbin Institute of Technology, Harbin 150001, ChinaYongqiang ZhaoSchool of Mechatronics Engineering, Har ...哈尔滨工业大学科研学术 本站小编 哈尔滨工业大学 2020-12-05Influence of Si Contents on the Microstructure Evolution and Mechanical Properties of Al-Mg-Si-Cu-Zn
Influence of Si Contents on the Microstructure Evolution and Mechanical Properties of Al-Mg-Si-Cu-Zn Alloys Author NameAffiliationLiang ZhuState Key Laboratory for Advanced Metals and Materials, University of Science and Technology Beijing, Beijing 100083, ChinaMingxing GuoS ...哈尔滨工业大学科研学术 本站小编 哈尔滨工业大学 2020-12-05How do Users Evaluate Service Quality of the Dockless Bicycle Sharing System?
How do Users Evaluate Service Quality of the Dockless Bicycle Sharing System? Author NameAffiliationJianrong LiuSchool of Civil Engineering and Transportation, South China University of Technology, Guangzhou 510640, China Abstract: In order ...哈尔滨工业大学科研学术 本站小编 哈尔滨工业大学 2020-12-05Hidden Attractors in a Delayed Memristive Differential System with Fractional Order and Chaos Synchr
Hidden Attractors in a Delayed Memristive Differential System with Fractional Order and Chaos Synchronization Author NameAffiliationDawei DingSchool of Electronics and Information Engineering, Anhui University, Hefei 230601, ChinaKey Laboratory of Intelligent Computing and S ...哈尔滨工业大学科研学术 本站小编 哈尔滨工业大学 2020-12-05Vibration Absorption Efficiency and Higher Branches Elimination of Variable-Stiffness Nonlinear Ener
Vibration Absorption Efficiency and Higher Branches Elimination of Variable-Stiffness Nonlinear Energy Sink Author NameAffiliationRui ZhongTianjin Key Laboratory of the Design and Intelligent Control of the Advanced Mechatronical System, Tianjin University of Technology,Tian ...哈尔滨工业大学科研学术 本站小编 哈尔滨工业大学 2020-12-05Heat Dissipation Performance of Metal Core Printed Circuit Board with Micro Heat Exchanger
Heat Dissipation Performance of Metal Core Printed Circuit Board with Micro Heat Exchanger Author NameAffiliationDiancheng QinGuangdong LED Packaging-Used Heat Dissipation Substrate Engineering Technology Research Center, Zhuhai 519180, Guangdong,ChinaKewei LiangRayben Techn ...哈尔滨工业大学科研学术 本站小编 哈尔滨工业大学 2020-12-05Biodegradation of Ammonia Nitrogen Using a Novel Candida sp. Strain N6 Immobilization
Biodegradation of Ammonia Nitrogen Using a Novel Candida sp. Strain N6 Immobilization Author NameAffiliationKai WangSchool of Marine Science and Technology, Harbin Institute of Technology, Weihai,Weihai 264209, Shandong, ChinaSchool of Municipal and Environmental Engineering ...哈尔滨工业大学科研学术 本站小编 哈尔滨工业大学 2020-12-05Aging Behavior and Creep Characteristics of CACB
Aging Behavior and Creep Characteristics of CACB Author NameAffiliationYunliang LiSchool of Transportation Science and Engineering, Harbin Institute of Technology, Harbin 150090, ChinaYuze LiuSchool of Transportation Science and Engineering, Harbin Institute of Technology, H ...哈尔滨工业大学科研学术 本站小编 哈尔滨工业大学 2020-12-05Adaptive Sliding Mode Control for the Excavator Manipulator
Adaptive Sliding Mode Control for the Excavator Manipulator Author NameAffiliationGuosheng XuSchool of Mechatronics Engineering, Harbin Institute of Technology, Harbin 150001, ChinaGuangming LvSchool of Mechatronics Engineering, Harbin Institute of Technology, Harbin 150001, ...哈尔滨工业大学科研学术 本站小编 哈尔滨工业大学 2020-12-05Effect of Crowding in Metro Carriages on Travelers’ Disutility: An Evidence from Guangzhou Metro
Effect of Crowding in Metro Carriages on Travelers’ Disutility: An Evidence from Guangzhou Metro Author NameAffiliationJianrong LiuSchool of Civil Engineering and Transportation, South China University of Technology, Guangzhou 510641, China Abstract: ...哈尔滨工业大学科研学术 本站小编 哈尔滨工业大学 2020-12-05
