Angle measurement error and compensation for pitched rotation of circular grating
CHEN Xi-jun, WANG Zhen-huan, WANG Zheng-bang, ZENG Qing-shuang
School of Astronautics,Harbin Institute of Technology,Harbin 150001,China
Abstract:
As circular grating is not vertical to the shaft,the angle measurement error of the circular grating is analyzed.Based on the moire fringe equations in pitched condition,the mathematic model of the angle measurement error is derived.The paper comes to the conclusion that the nonorthogonal angle between the circular grating and the shaft leads to the second harmonic error of the angle measurement,and the correctness of the result is proved by the experimental data.The method of the error compensation is presented,and the angle measurement accuracy of the circular grating is improved by the error compensation.
Key words: circular grating nonorthogonal angle moire fringe second-harmonic error
DOI：10.11916/j.issn.1005-9113.2011.03.003
Clc Number:TP274
Fund:
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Angle measurement error and compensation for pitched rotation of circular grating
本站小编 哈尔滨工业大学/2019-10-23
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