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Angle measurement error and compensation for decentration rotation of circular gratings

本站小编 哈尔滨工业大学/2019-10-23

Angle measurement error and compensation for decentration rotation of circular gratings

CHEN Xi-jun, WANG Zhen-huan, ZENG Qing-shuang

Space Control and Inertial Technology Research Center,Harbin Institute of Technology,Harbin 150001,China



Abstract:

As the geometric center of circular grating does not coincide with the rotation center,the angle measurement error of circular grating is analyzed. Based on the moire fringe equations in decentration condition,the mathematical model of angle measurement error is derived. It is concluded that the decentration between the centre of circular grating and the center of revolving shaft leads to the first-harmonic error of angle measurement. The correctness of the result is proved by experimental data. The method of error compensation is presented,and the angle measurement accuracy of the circular grating is effectively improved by the error compensation.

Key words:  circular grating  decentration  moire fringe  first-harmonic error

DOI:10.11916/j.issn.1005-9113.2010.04.019

Clc Number:P207

Fund:


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