宋毅




职称/学术兼职

副教授，硕导


职位



联系方式

yi.song@whu.edu.cn


主要研究方向

芯片的纳米尺寸光学测量，芯片的制程良率控制，光刻技术，纳米光学器件


教育工作经历

教育工作经历
2019.09起，武汉大学工业科学研究院， 副教授
2013.04-2019.08 荷兰ASML光刻机公司， 资深研究员
2011.11-2013.02 比利时IMEC欧洲微电子研究中心， 研究员
2008.09-2011.07 瑞典皇家工学院， 微电子与应用物理专业， 博士
2005.09-2008.07 北京大学物理学院， 光学专业， 硕士
2001.09-2005.07 南京大学物理系， 理论物理专业， 学士


论文发表和专利



"Spacer multi-patterning control strategy with optical CD metrology on device structures", Proc. SPIE 9778, Metrology, Inspection, and Process Control for Microlithography XXX, 97782B, 2016
"Mixed-mode, high-order multi-patterning control strategy with small-spot, optical CD metrology on device structures", Proc. SPIE 9778, Metrology, Inspection, and Process Control for Microlithography XXX, 97782E, 2016
"Integrated ADI optical metrology solution for lithography process control of CD and OV", SPIE 9050, Metrology, Inspection, and Process Control for Microlithography XXVIII, 90501J, 2014.
Yi Song, Jing Wang, Min Yan, and Min Qiu, "Efficient coupling between dielectric and hybrid plasmonic waveguides by multimode interference power splitter", J. Opt. 13 075002, 2011.
Yi Song, Jing Wang, Min Yan, and Min Qiu, "Subwavelength hybrid plasmonic nanodisk with high Q factor and Purcell factor", J. Opt. 13 075001, 2011.
Yi Song, Min Yan, Qing Yang, Li-min Tong, and Min Qiu, "Reducing crosstalk between nanowire-based hybrid plasmonic waveguides", Opt. Comm., volume 284(1):480-484, 2011.
Yi Song, Jing Wang, Qiang Li, Min Yan, and Min Qiu, "Broadband coupler between silicon waveguide and hybrid plasmonic waveguide", Opt. Express., volume 18(12):13173-13179, 2010.
Qiang Li, Yi Song, Gan Zhou, Yikai Su, and Min Qiu, "Asymmetric plasmonic-dielectric coupler with short coupling length, high extinction ratio, and low insertion loss", Opt. Lett., volume 35:3153, 2010.
Jing Wang, Yi Song, Wei Yan, and Min Qiu, "High-Q photonic crystal surface-mode cavities on crystalline SOI structures", Opt. Comm., volume 283(11):2461-2464, 2010.
Jing Wang, Yi Song, Min Yan and Min Qiu, "Efficient coupler between silicon waveguide and hybrid plasmonic waveguide", Proc. SPIE 7987, 79870B, 2010.
Bozena Jaskorzynska, Yi Song, and Min Qiu, "Tradeoff between mode confinement, loss, and cross-talk, for dielectric and metal slot waveguides", Photonics Letters of Poland, 1(4):172-174, 2009.
Jie Tian, Zhe Ma, Qiang Li, Yi Song, Zhihong Liu, Qing Yang, Chaolin Zha, Johan ?…kerman, Limin Tong, and Min Qiu, "Nanowaveguides and couplers based on hybrid plasmonic modes", App. Phys. Lett., volume 97:231121, 2010.