话题: amine更多
Effect of organic amine alkali and inorganic alkali on benzotriazole removal during post Cu-CMP clea
1.IntroductionWiththereductionoffeaturesizeandtheincreaseoftheintegrationlevelinanintegratedcircuit(IC),therequirementforcleanlinessofthemultilayerCuw ...中科院半导体研究所 本站小编 Free考研考试 2022-01-01