朱　煜
技术职务:长聘教授/博士生导师
办公电话:**
通讯地址:清华大学李兆基科技大楼A801-1
电子邮件:zhuyu@tsinghua.edu.cn





教育背景
工作履历
教学工作
科研工作
论文与专利
奖励与荣誉

1998/09-2001/7,中国矿业大学，博士
1990/09-1993/007,中国矿业大学，硕士
1979/09-1983/7,北京师范大学，学士


2007.12-2012.12/-至今，清华大学精仪系制造所/机械系机电所，长聘教授，博导
2004.04-2007.11，清华大学精仪系，副教授
2001.09-2004.03，清华大学制造工程研究所，博士后
1999.09-2001.07，清华大学制造工程研究所，访问
1997.01-2004.03，中国矿业大学，副教授
1983.08-1996.12，中国矿业大学，讲师


研究生课程：
“研究生与职业素养讲座”


本科生课程：
“现代机电工程”“机电系统设计实践”“机械工程前沿”


主要从事超精密机械与测控方向研究，包括精密测量与控制理论、超精密机械设计与制造、电子制造装备及其系统等，研制出国内首个光刻机双工件台系统样机，关键技术指标已达到国际同类光刻机双工件台的先进水平。


承担多项国家科技重大专项、973、自然科学基金、863等项目，出版学术专著2部，发表论文180余篇，申请发明专利190余项（已授权国内发明专利140余项、美国专利23项）


代表著作
1．陈霸东，朱煜，胡金春，《系统参数辨识的信息准则及算法》. 2011.
2．陈霸东，朱煜，胡金春，Jose C.Principe. System Parameter Identification Information Criteria & Algorithms，Elsevier(英文版). 2013.


代表论文
1. Sen Lu; Kaiming Yang; Yu Zhu; Leijie Wang; Ming Zhang, Real-time correction of periodic nonlinearity in homodyne detection for Scanning Beam Interference Lithography.Optical Engineering, 2018.57(10),SCI: GZ4CJ EI:20**0.
2.Jiaqi Zhao; Ming Zhang; Yu Zhu; Xin Li,et al.A novel optimization design method of additive manufacturing oriented porous structures and experimental validation. Materials and design, 2018.107550, SCI: 10.1016/j.matdes.
3.Ding Yuan; Ming Zhang; Yu Zhu; Xin Li;et al.Performance Evaluation of the Wrench Models of Ironless Permanent Magnet Planar Motor With Different Simplifications.IEEE TRANSACTIONS ON MAGNETICS,2018.**,SCI:10.1109/TMAG.
4.Min Li; Yu Zhu;Kaiming Yang;Chuxiong Hu; Haihua Mu,An Integrated Model-Data Based Zero Phase Error Tracking Feedforward Control Strategy with Application to An Ultra-Precision Wafer Stage.IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS,2017.64(5):4139-4149.
5.Min Li; Kaiming Yang; Yu Zhu; Haihua Mu; Chuxiong Hu,State/Model-Free Variable-Gain Discrete Sliding Mode Control for An Ultra-Precision Wafer Stage.IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS,2017.64(8):6695-6705.
6.Yu Zhu; Ding Yuan; Ming Zhang; Feng Liu; Chuxiong Hu, Unified wrench model of an ironless permanent magnet planar motor with 2D periodic magnetic field. IET Electric Power Applications, SCI10.1049/iet-epa.2017.0605.
7.Yu Zhu; Jiang Yi; Kaiming Yang; et al.Convergence performance oriented data-driven tuning method for parameterized controller design with cases investigation. IET Control Theory and Applications,2016.10(2):1322-1330.
8.Yu Zhu; Leijie Wang; Ming Zhang; et al. Novel homodyne frequency-shifting interference pattern locking system. Chinese Optics Letters,2016.14(6):061201-061206.
9. Yu Zhu; Chuxiong Hu; et al. Accuracy- and Simplicity-Oriented Self-Calibration Approach for Two-Dimensional Precision Stages. IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS. 60(1): 2264-2272, 2013.
10. Yu Zhu; Shengguo Zhang; et al. Augmentation of Propulsion Based on Coil Array Commutation for Magnetically Levitated Stage. IEEE Transactions on Magnetics，48(1):31-37, 2012.


近年专利
1. ZHU Yu, ZHANG Ming, et al. COARSE MOTION AND FINE MOTION INTEGRATED RETICLE STAGE DRIVEN BY PLANAR MOTOR, US 15/307,752.
2. ZHU Yu, ZHANG Ming, et al. DUAL-FREQUENCY GRATING INTERFEROMETER DISPLACEMENT MEASUREMENT SYSTEM, US 14/441,828
3. ZHU Yu, ZHANG Ming, et al. OPTICAL GRATING PHASE MODULATOR FOR LASER INTERFERENCE PHOTOETCHING SYSTEM, US 14/761,605.
4. ZHU Yu, WANG Leijie, et al. THREE-DOF HETERODYNE GRATING INTERFEROMETER DISPLACEMENT MEASUREMENT SYSTEM, US 14/900,111.
5. ZHU Yu, ZHANG Ming, et al. SIX-DEGREE-OF-FREEDOM DISPLACEMENT MEASUREMENT METHOD FOR EXPOSURE REGION ON SILICON WAFER STAGE, US 15/568,118.
6. ZHANG Ming, ZHU Yu, et al. HETERODYNE GRATING INTERFEROMETER DISPLACEMENT MEASUREMENT SYSTEM, US 14/441,821.
7. 张鸣,朱煜,等.一种三自由度的运动工作台,9.9.
8. 穆海华,朱煜,等.一种永磁弹射掩模台弹射区电机出力最小轨迹规划方法,3.5.
9. 朱煜,胡金春,等.一种基于磁场的六自由度位移测量方法, 4.0.
10.朱煜,杨开明,等.一种基于VPX总线的工件台同步运动控制系统及方法, 7.5.


1.获2018年度北京市科学技术一等奖、中国专利银奖；
2.2015获年度中国专利优秀奖；
3. 2012年入选国家“”首批科技创新领军人才，科技部“重点领域创新团队”带头人；