关键词: 光学系统波像差检测/
计算机辅助装调/
夏克-哈特曼波前传感器/
离轴反射变焦距系统
English Abstract
Novel multiple field of view detection method for the off-axis reflection zoom optical system
Zhou Ji-De,Chang Jun,
Niu Ya-Jun,
Xie Gui-Juan,
Wang Xi
1.School of Optoelectronics, Beijing Institute of Technology, Beijing 100081, China
Fund Project:Project supported by the National Natural Science Foundation of China (Grant No. 61178041).Received Date:27 September 2015
Accepted Date:01 January 2016
Published Online:05 April 2016
Abstract:In order to study the computer-aided alignment for the off-axis reflective zoom optical system, the wavefront aberration of the off-axis reflective zoom system across the field of view needs to be detected. Obtaining the wavefront aberration across the field of view could improve the accuracy of the computer-aided alignment for the off-axis reflective zoom optical system. Restricted by the current wavefront aberration detection technology, only the wavefront aberration at a field degree of 0 could be detected. To solve this problem, a new method to detect the wavefront aberration of off-axis reflective zoom system across the field of view is proposed. According to the traditional autocollimation interferometry method, we improve the detection method by substituting the scan of standard plane mirror with the deformable mirror, replacing the interferometer with Shark-Hartmann sensor and employing the accurately calibrated laser source array to realize the wavefront aberration detection at multiple field of view simultaneously. The simulation shows that the residual wavefront aberration root-mean-square values after compensating for the deformation mirror in the following 6 fields of view (0, 3), (0, 4.2), (0, 5.5), (0, 7), (0, 9.8), and (0, 14) are 0.00039, 0.00075, 0.00024, 0.00017, 0.00053, and 0.0057, respectively. It shows that the detection method we proposed is suitable for the computer-aided alignment technology for the off-axis reflective zoom system.
Keywords: wavefront aberration of optical system detection/
computer-aided alignment/
Shark-Hartmann sensor/
off-axis reflective zoom system
