姓名: 王向朝
性别: 男
职务: 实验室主任
职称: 研究员(自然科学)
学历: 博士研究生毕业
通讯地址: 上海市嘉定区清河路390号
电子邮件: wxz26267@siom.ac.cn
邮政编码: 201800
部门/实验室：信光
简历
1982年毕业于大连理工大学。1989年作为日本政府国费留学生赴日本留学，就读于日本新泻大学工学院，1992年获硕士学位，1995年获博士学位。1995年至1998年8月留校任助理教授。1998年9月回国，进入上海光学精密机械研究所工作至今，研究员、博士生导师。
作为项目负责人先后承担和完成国家863计划、国家自然科学基金、中科院高技术研究与发展重点项目、上海市科委基础研究重点项目等二十余项国家、中科院、上海市科研项目。带领课题组在高端光刻机技术、纳米精度光学测量技术、生物医学光学成像技术等领域取得多项科研成果，多项成果经国家级测试机构检测并经专家委员会鉴定达到国际先进水平。
申请国际与国内专利170余项（其中发明专利123项），已获专利授权87项（其中发明专利51项），获计算机软件著作权2项。在《Applied Physics Letters》、《Optics Letters》、《Optics Express》、《Applied Optics》、《Journal of the Optical Society of America》等国际学术期刊及《中国科学》、《物理学报》、《光学学报》、《中国激光》、《Chinese Optics Letters》等国内学术期刊上发表论文260余篇。
现任全国政协委员。享受国务院特殊津贴专家。
毕业博士研究生43名。目前在读博士生9名。指导的研究生中多人次获中科院院级奖学金。


研究方向光学专业
1. DUV极限光刻矢量场衍射光学
2. EUV光刻成像光学
3. 混浊介质光传输理论及其应用
光学工程专业
1. 信息光电子技术
2. 高端光刻机技术
3. 纳米干涉检测技术
4. 生物医学光学成像技术
5. 先进光传感技术
6. 偏振光技术与应用

毕业研究生就职情况1.国内外企业从事高新技术研发工作。这些企业包括ASML、KLA-Tencor、Intel、Philips、GE、Chartered Semiconductor等跨国公司，上海微电子装备有限公司(SMEE)、大唐电信等国内高新技术企业。
2.南京大学、浙江大学等国内高校从事科研、教学工作。
3.美国University of Rice、University of Southern California、University of Oregon等国外高校从事科研工作。
4.中科院、航天科技集团、中电科技集团从事科研工作。

近年发表论文举例1、Guanyong Yan, Xiangzhao Wang, Sikun Li, Jishuo Yang, Dongbo Xu, Andreas Erdmann, “Aberration measurement technique based on an analytical linear model of a through-focus aerial image,” Optics Express, 22(5), 5623-5634, (2014)
2、Nan Nan, Xiangzhao Wang, Peng Bu, Zhongliang Li, Xin Guo, Yan Chen, Xuan Wang, Fenghua Yuan, Osami Sasaki, “Full-range Fourier domain Doppler optical coherence tomography based on sinusoidal phase modulation,” Applied Optics, 53(12), 2669-2676 (2014)
3、Guanyong Yan, Xiangzhao Wang, Sikun Li, Jishuo Yang, Dongbo Xu, “Aberration measurement based on principal component analysis of aerial images of optimized marks,” Optics Communications, 329, 63–68 (2014)
4、Bingjie Huang, Peng Bu, Xiangzhao Wang, Nan Nan, Xin Guo, “Full-range parallel Fourier-domain optical coherence tomography using a spatial carrier frequency,” Applied Optics, 52(5), 958-965 (2013).
5、Fengzhao Dai; Feng Tang; Xiangzhao Wang， Osami Sasaki, Min Zhang, “High spatial resolution zonal wavefront reconstruction with improved initial value determination scheme for lateral shearing interferometry,” Applied Optics, 52(17), 3946-3956 (2013)
6、Bingjie Huang, PengBu, XiangzhaoWang, NanNan, XinGuo, “Speckle reduction in parallel optical coherence tomography by spatial compounding,” Optics & Laser Technology, 45, 69-73 (2013)
7、Sikun Li，Xiangzhao Wang，Yang Bu，“Robust pixel-based source and mask optimization for inverse lithography”，Optics & Laser Technology，45，285-293（2013）
8、Jishuo Yang, Xiangzhao Wang, Sikun Li, Lifeng Duan, Anatoly Y. Bourov, Andreas Erdmann, “Adaptive denoising method to improve aberration measurement performance,” Optics Communications, 308, 228-236 (2013)
9、Xin Guo, Peng Bu, Xiangzhao Wang, Osami Sasaki, Nan Nan, Bingjie Huang, Zhongliang Li, Scattering imaging of skin in Fourier domain optical coherence tomography, Optics Communications, 305, 137-142 (2013)
10、Sikun Li, Yong-Liang Xiao, Xiangzhao Wang, Three-dimensional information security combined fringe projection with double random phase encoding, Optics Communications, 296, 35-40 (2013)
11、Guanyong Yan, Xiangzhao Wang, Sikun Li, Jishuo Yang, Dongbo Xu, Lifeng Duan, Anatoly Y. Bourov, Andreas Erdmann, “In situ aberration measurement technique based on an aerial image with an optimized source,” Optical Engineering, 52(6), 063602 (2013)
12、Jishuo Yang, Xiangzhao Wang, Sikun Li, Lifeng Duan, Guanyong Yan, Dongbo Xu, Anatoly Y. Bourov, Andreas Erdmann, “High-order aberration measurement technique based on a quadratic Zernike model with optimized source,” Optical Engineering, 52(5), 053603 (2013)
13、Zhang Rong, Wang Xiangzhao, Cheng Xin, “Far-zone polarization distribution properties of partially coherent beams with non-uniform source polarization distributions in turbulent atmosphere,” Optics Express, 20(2), 1421-1435 (2012)
14、Lifeng Duan, Xiangzhao Wang, Guanyong Yan, Anatoly Bourov, “Practical application of aerial image by principal component analysis to measure wavefront aberration of lithographic lens,” J. Micro/Nanolith. MEMS MOEMS, 11(2), 023009 (2012)
15、Bingjie Huang, PengBu, XiangzhaoWang, NanNan, XinGuo, “Speckle reduction in parallel optical coherence tomography by spatial compounding,” Optics & Laser Technology, 45, 69-73 (2012)
16、Sikun Li，Xiangzhao Wang，Xianyun Su，Feng Tang，“Two-dimensional wavelet transform for reliability-guided phase unwrapping in optical fringe pattern analysis”，Applied Optics, 51(12), 2026-2034 (2012)
17、Bofan Wang, Xiangzhao Wang, Osami Sasaki, Zhongliang Li, “Sinusoidal phase-modulating interferometer insensitive to intensity modulation of a laser diode for displacement measurement,” Applied Optics, 51(12), 1939-1944 (2012)
18、Bofan Wang, Xiangzhao Wang, Zhongliang Li, Osami Sasaki, “Sinusoidal phase-modulating laser diode interferometer insensitive to intensity modulation for real-time displacement measurement with feedback control system”, Optics Communications, 283, 2309-2317 (2010)
19、Yuting Cao, Xiangzhao Wang, Yuanying Tu, Peng Bu, “Impact of mask absorber thickness on the focus shift effect in extreme ultraviolet lithography,” Journal of Vacuum Science & Technology. B, 30, 031602 (2012)
20、Fengzhao Dai, Feng Tang, Xiangzhao Wang, Peng Feng, Osami Sasaki, “Use of numerical orthogonal transformation for the Zernike analysis of lateral shearing interferograms,” Optics Express, 20(2),1530-1544 (2012)
21、Fengzhao Dai, Feng Tang, Xiangzhao Wang, Osami Sasaki, Peng Feng, “Modal wavefront reconstruction based on Zernike polynomials for lateral shearing interferometry: comparisons of existing algorithms,” Applied Optics, 51(21), 5028–5037 (2012)
22、Fengzhao Dai, Feng Tang, Xiangzhao Wang, Osami Sasaki, “Generalized zonal wavefront reconstruction for high spatial resolution in lateral shearing interferometry,” Journal of the Optical Society of America A, 29(9), 2038-2047 (2012)
23、Yuanying Tu, Xiangzhao Wang, Sikun Li, Yuting Cao, “Analytical approach to the impact of polarization aberration on lithographic imaging,” Optics Letters, 37(11), 2061-2063 (2012)
24、Lifeng Duan, Xiangzhao Wang, Anatoly Y. Bourov, Bo Peng, Peng Bu, “In situ aberration measurement technique based on principal component analysis of aerial image”, Optics Express, 19(19), 18080-18090 (2011)
25、Rong Zhang, Xiangzhao Wang, Xin Cheng, “Evolution properties of the intensity distribution of an anisotropic Gaussian Schell-model beam in a turbulent atmosphere,” Journal of the Optical Society of America A, 28(9), 2160-2170 (2011)
26、Rong Zhang, Xiangzhao Wang, Xin Cheng, Zicheng Qiu, “Polarization distribution control of anisotropic electromagnetic Gaussian–Schell model beams on free propagation by exploiting correlation properties at the source plane,” Journal of the Optical Society of America A, 27(11), 2496-2505 (2010)
27、Bo Peng, Xiangzhao Wang, Zicheng Qiu, Yuting Cao, Lifeng Duan, “Even aberration measurement of lithographic projection optics based on intensity difference of adjacent peaks in an alternating phase shifting mask image,” Applied Optics, 49(15), 2753-2760 (2010)
28、Bo Peng, Xiangzhao Wang, Zicheng Qiu, Qiongyan Yuan, Yuting Cao “Aberration induced intensity imbalance of alternating phase shifting mask in lithographic imaging,” Optics Letters, 35(9), 1404-1406 (2010)
29、Bo Peng, Xiangzhao Wang, Zicheng Qiu, Qiongyan Yuan, “Measurement technique for characterizing odd aberration of lithographic projection optics based on dipole illumination,” Optics Communications, 283, 2309-2317 (2010)
30、Xin Cheng, Xiangzhao Wang, “Comment on ‘Third-order scattering model for the diffuse backscattering intensity patterns of polarized light from a turbid medium [Appl. Phys. Lett. 90, 153902 (2007)]’,” Applied Physics Letters, 94(5), 046101-2 (2009)
31、Zicheng Qiu, Xiangzhao Wang, Qiongyan Yuan, Fan Wang, “Coma measurement by use of an alternating phase-shifting mask mark with a specific phase width,” Applied Optics, 48(2), 261-269 (2009)
32、QiongyanYuan, Xiangzhao Wang, Zicheng Qiu, Fan Wang, Mingying Ma, “Even aberration measurement of lithographic projection system based on optimized phase-shifting marks,” Microelectronic Engineering, 86(1), 78-82 (2009)
33、Zicheng Qiu, Xiangzhao Wang, Qunyu Bi, Qiongyan Yuan, Bo Peng, Lifeng Duan “Translational-symmetry alternating phase shifting mask grating mark used in a linear measurement model of lithographic projection lens aberrations,” Applied Optics, 48(19), 3654-3663 (2009)
34、Shaoqing Wang, Xiangzhao Wang, Yingming Liu, Yang Bu, “Theoretical model for a periodically driven semiconductor laser subject to optical feedback from a microcantilever,” Journal of the Optical Society of America B, 25(8), 1350-1355 (2008)
35、Defeng Zheng, Xiangzhao Wang, Zhongliang Li, “Accuracy analysis of parallel plate interferometer for angular displacement measurement,” Optics & Laser Technology, 40(1), 6-12 (2008)
36、Peng Bu, Xiangzhao Wang, Osami Sasaki, “One-shot parallel complex Fourier-domain optical coherence tomography using a spatial carrier frequency,” Optical Engineering, 47, 050502 (2008)
37、Kun Yang, Aijun Zeng, Xiangzhao Wang, Feng Tang, Hua Wang, “Simultaneous phase-shifting ellipsometry based on grating beamspliter,” Optical Engineering, 47, 63602, (2008)
38、李中梁, 王向朝, 劉英明, 佐々木修己, 単一光源によるマイクロメカニカル共鳴器の励起および振動検出, 光学, 37(9), 545-550 (2008)
39、Hua Wang, Xiangzhao Wang, Aijun Zeng, Kun Yang, “Effects of coherence on anisotropic electromagnetic Gaussian Schell-model beams on propagation,” Optics Letters, 32(15), 2215-2217 (2007)
40、Qiongyan Yuan, Xiangzhao Wang, Zicheng Qiu, Fan Wang, Mingying Ma, and Le He, “Coma measurement of projection optics in lithographic tools based on relative image displacements at multiple illumination settings,” Optics Express, 15(24), 15878-15885 (2007)
41、Feng Tang, Xiangzhao Wang , Yimo Zhang, Wencai Jing, “Characterization of birefringence dispersion in polarization-maintaining fibers by use of white-light interferometry,” Applied Optics, 46(19), 4073-4080 (2007)
42、Peng Bu, XiangzhaoWang , Osami Sasaki, “Full-range parallel Fourier-domain optical coherence tomography using sinusoidal phase-modulating interferometry,” Journal of Optics A-Pure and Applied Optics, 9(4), 422-426 (2007)
43、Feng Tang, Xiangzhao Wang, “Influence of birefringence dispersion on distributed measurement of polarization coupling in birefringent fibers,” Optical Engineering, 46(7), 075006 (2007)
44、Hua Wang, Xiangzhao Wang, Aijun Zeng, Wei Lu, “Changes in the coherence of quasi-monochromatic electromagnetic Gaussian Schell-model beams propagating through turbulent atmosphere,” Optics Communications. 276(2), 218-221 (2007)
45、Hua Wang, Xiangzhao Wang, Aijun Zeng, Kun Yang, “Anisotropic-source-induced changes of the degree of polarization of stochastic electromagnetic beams on propagation,” Journal of Optics A-Pure and Applied Optics, 9(8), 1053-1056(2007)
46、Peng Bu, Xiangzhao Wang, “Dynamic full-range Fourier-domain optical coherence tomography by using sinusoidal phase-modulating interferometry,” Optical Engineering, 46(10), 105603 (2007)
47、Defeng Zheng, Xiangzhao Wang, Osami Sasaki, “Parallel Plate Interferometer with a Reflecting Mirror for Measuring Angular Displacement,” Optical Review, 14(5), 314-318 (2007)
48、Dongqing Zhang, Xiangzhao Wang , Weijie Shi, Fan Wang, “A novel method for measuring the coma of a lithographic projection system by use of mirror-symmetry marks,” Optics & Laser Technology, 39(5), 922-925 (2007)
49、Defeng Zheng, Xiangzhao Wang, Osami Sasaki, “Small dynamic angle measurement using tangent relationship and phase modulating technique,” Optical Engineering, 46(9), 093602 (2007)
50、Mingying Ma, Xiangzhao Wang, Fan Wang, “Aberration measurement of projection optics in lithographic tools based on two-beam interference theory,” Applied Optics, 45(32), 8200-8208 (2006)

指导学生已指导学生
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步扬 博士研究生 080300-光学工程
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