王博士 导师介绍
姓名
王博士


学位/职称
博士/长鑫存储公司 资深首席工程师

办公室电话
166 0565 9668

Email
Yaner.hu@cxmt.com

教育背景
厦门大学 半导体器件物理，学士；
中科院上海技术物理研究所，微电子、半导体及器件物理博士

研究方向
先进存储器预研

任职经历
Nantero Technology Beijing/ Nantero, Inc. Woburn Boston
General Manager and Corporate Representative/Director of Engineering
Wuhan XMC Director of Reliability Engineering
Intel Dalian Technology Transfer Technical Leader / Staff Technologist
United Microelectronics Corporation (Singapore) Staff Engineer
Chartered Semiconductor Manufacturing (Singapore) Senior Process Integration Engineer
Grace Semiconductor Manufacturing (Shanghai) Principal Engineer
Shanghai Institute of Technical Physics Assistant Researcher/Group Leader

主持、参与项目
Process Integration Engineering
- Customer A: 0.18->0.16um Shrink Al SRAM process;
- Customer B: 0.13um Cu Hi-performance Process;
- Customer C: 65nm technology transfer, yield enhancement, and new process development;
- Process unification for 90nm/65nm technologies nodes;
- Customer D: 0.13um Ultra Low Leakage Process Development;
- Ultra Narrow Scribe Line (<60um) Development;
- Customer E: 0.11um Process Transfer & Reliability Improvement;
- Participated a very successful start-up of a new wafer fab in 65nm technology node as a chief process integrator, and performed sustaining excellence;
- Several New Chemical Development for 65nm BEoL Wet Clean Process;
- Inline defect improvement with optimizing cleaning process post copper CMP;

个人获奖


l 代表性论著